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Microelectromechanical Systems: Advanced Materials and Fabrication Methods
by National Research Council (U.S.)., Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Research Council (U.S.)., National Materials Advisory Board, National Research Council (U.S.)., Commission on Engineering and Technical Systems
fromOnline access: National Academy of Sciences National Academ…
0
Type: Book
Microelectromechanical systems: advanced materials and fabrication methods
by National Research Council (U.S.)., Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Research Council (U.S.)., National Materials Advisory Board, National Research Council (U.S.)., Commission on Engineering and Technical Systems
0
Type: Book