Microelectromechanical Systems: Advanced Materials and Fabrication Methods

Microelectromechanical Systems: Advanced Materials and Fabrication Methods

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Title Statements

  • Full title :Microelectromechanical Systems: Advanced Materials and Fabrication Methods

Publication Statements

The Physical Object

  • Description:1 online resource

Edition Identifiers

  • ISBN:9780309591515, 0309591511, 9780309059800, 0309059801
  • oclc:on1229310573
  • LC Classification:Q

Subjects

Microelectromechanical systems -- Desig… Microelectronics -- Materials Microélectronique -- Matériaux

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