Micro electro mechanical system design

Micro electro mechanical system design

by Allen, James J.

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Title Statements

  • Full title :Micro electro mechanical system design / James J. Allen.

Edition Statements

  • Publication Date:2005.

Publication Statements

  • Publisher(s):CRC Press
  • Place of Publication:Boca Raton, FL
  • Language:eng
  • Publication Date:2005.

Edition Identifiers

  • ISBN:0824758242, 9780824758240
  • oclc:ocn957358295
  • LC Classification:TK153
  • Dewey Decimal:621 22

Subjects

Conception technique Engineering design Microelectromechanical systems -- Desig…

Writers

Allen, James J.

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