This text describes a variety of practical and emerging power electronic converters made feasible by the new generation of power semiconductor devices. Topics include an expanded discussion of diode rectifiers and thyristor converters as well as chapterson heat sinks and magneti…
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This text describes a variety of practical and emerging power electronic converters made feasible by the new generation of power semiconductor devices. Topics include an expanded discussion of diode rectifiers and thyristor converters as well as chapterson heat sinks and magneti…
This text describes a variety of practical and emerging power electronic converters made feasible by the new generation of power semiconductor devices. Topics include an expanded discussion of diode rectifiers and thyristor converters as well as chapterson heat sinks and magneti…
"Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes and sh…
The cleaning of semiconductor wafers has become one of the most critical operations in the fabrication of semiconductor devices. The considerable body of technical and scientific literature is widely dispersed in numerous journals and symposia proceedings. This book brings toget…
Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.