Atomic layer processing: semiconductor dry etching technology
Type
Book
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Title Statements
- Full title :Atomic layer processing : semiconductor dry etching technology / Thorsten Lill.
Edition Statements
- Publication Date:2021.
Publication Statements
- Publisher(s):Wiley-VCH
- Place of Publication:Weinheim, Germany
- Language:eng
- Publication Date:2021.
The Physical Object
- Description:1 online resource
Edition Identifiers
- ISBN:9783527824199, 3527824197, 9783527824182, 3527824189, 9783527824205, 3527824200
- DOI:10.1002/9783527824199
- oclc:on1249564453
- LC Classification:TK7871.85
- Dewey Decimal:621.3815/2
Table of Contents
Introduction -- Fundamentals -- Thermal Etching -- Thermal Isotropic ALE -- Radical Etching -- Directional ALE -- Reactive Ion Etching -- Ion Beam Etching -- Etching Species Generation -- Emerging Etching Technologies.
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