Title Statements
- Full title :Semiconductor manufacturing technology / Chue San Yoo.
Edition Statements
- Publication Date:©2008.
Publication Statements
- Publisher(s):World Scientific
- Place of Publication:Singapore
- Language:eng
- Publication Date:©2008.
The Physical Object
- Description:xii, 470 pages : : illustrations ; : 24 cm
Edition Identifiers
- ISBN:9812568239, 9789812568236
- oclc:ocn276897117
- LC Classification:TK7871.85
- Dewey Decimal:621.38152
Table of Contents
Building Blocks for Integrated Circuits; Thermal Oxidation; Gas Kinetics and Plasma Physics; Chemical Vapor Deposition; Plasma-enhanced Chemical Vapor Deposition and Etching; Pattern Transfer: Photolithography; Pattern Generation: Photomask Processing; Doping Technology; Metallization and Silicidation; Planarization and CMP Technology; Copper and Low k.
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