Title Statements
- Full title :Silicon processing for the VLSI era. / Stanley Wolf, Richard N. Tauber.
Edition Statements
- Publication Date:c2000.
- Edition:2nd ed
Publication Statements
- Publisher(s):Lattice
- Place of Publication:Sunset Beach, Calif
- Language:eng
- Publication Date:c2000.
Notes
Previous ed.: 1986.
The Physical Object
- Description:xxxvi, 890 p. : : ill. ; : 25 cm.
Edition Identifiers
- ISBN:0961672161, 9780961672164
- oclc:on1179443054
Subjects
Writers
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