Silicon processing for the VLSI era

by Wolf, Stanley

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Title Statements

  • Full title :Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.

Edition Statements

  • Publication Date:©2000->

Publication Statements

  • Publisher(s):Lattice Press
  • Place of Publication:Sunset Beach, Calif
  • Language:eng
  • Publication Date:©2000->

Notes

JM20000323.

The Physical Object

  • Description:1 online resource (volumes <1->) : : illustrations

Edition Identifiers

  • oclc:on1348130723
  • LC Classification:TK7874

Table of Contents

V. 1. Process technology.

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Subjects

Circuits intégrés à très grande échelle Integrated circuits -- Very large scale… Silicium Silicium -- Applications industrielles Silicon

Writers

Wolf, Stanley Tauber, Richard N.

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