Silicon processing for the VLSI era

Silicon processing for the VLSI era

by Wolf, Stanley

Type Book
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Title Statements

  • Full title :Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.

Edition Statements

  • Publication Date:©2002-
  • Edition:2nd ed

Publication Statements

  • Publisher(s):Lattice Press
  • Place of Publication:Sunset Beach, Calif
  • Language:eng
  • Publication Date:©2002-

The Physical Object

  • Description:volumes <1> : : illustrations ; : 25 cm

Edition Identifiers

  • ISBN:0961672161, 9780961672164
  • oclc:ocm53797045
  • LC Classification:TK7874
  • Dewey Decimal:621.381/73

Table of Contents

v. 1. Process technology.

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Subjects

Circuits intégrés à très grande échelle Integrated circuits -- Very large scale… Semi-conducteurs -- Attaque chimique Semiconductors -- Etching Silicium Silicon

Writers

Wolf, Stanley Tauber, Richard N.

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