This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition…
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition…
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition…
This advanced textbook on fundamental macroscopic plasma physics emphasizes the nonlinear and relativistic effects due to laser-plasma interactions. Experiments with lasers of high intensity helped to discover new quantum effects and the longitudinal components of optical radiat…
This book offers an introduction to the booming field of high-power laser-matter interaction. It covers the heating of matter to super-high temperatures and pressures, novel schemes of fast particle acceleration, matter far from thermal equilibrium, stimulated radiation scatteri…