Plasma processing for VLSI

Plasma processing for VLSI

by Brown, Dale M. Einspruch, Norman G.

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Title Statements

  • Full title :Plasma processing for VLSI / edited by Norman G. Einspruch, Dale M. Brown.

Edition Statements

  • Publication Date:1984.

Publication Statements

  • Publisher(s):Academic Press
  • Place of Publication:New York
  • Language:eng
  • Publication Date:1984.

The Physical Object

  • Description:1 online resource (xiv, 527 pages :) : illustrations.

Edition Identifiers

  • ISBN:0122341082, 9780122341083
  • oclc:on1340060679
  • LC Classification:TK7874
  • Dewey Decimal:621.381/73

Subjects

Integrated circuits -- Very large scale… Plasma (Ionized gases) -- Industrial ap…

Writers

Brown, Dale M. Einspruch, Norman G.

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