Plasma Processes for Semiconductor Fabrication

Title Statements

• Full title :Plasma Processes for Semiconductor Fabrication / W.N.G. Hitchon.

Edition Statements

• Publication Date:1999.

Publication Statements

• Publisher(s):Cambridge University Press
• Place of Publication:Cambridge
• Language:eng
• Publication Date:1999.

The Physical Object

• Description:1 online resource (232 pages)

Edition Identifiers

• ISBN:9780511529511, 0511529511, 9780521591751, 0521591759, 9780521018005, 0521018005
• oclc:on1170714151
• LC Classification:TK7871.85
• Dewey Decimal:621.3815/2

Subjects

Writers

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