Title Statements
- Full title :Plasma Processes for Semiconductor Fabrication / W.N.G. Hitchon.
Edition Statements
- Publication Date:1999.
Publication Statements
- Publisher(s):Cambridge University Press
- Place of Publication:Cambridge
- Language:eng
- Publication Date:1999.
Notes
Title from publishers bibliographic system (viewed on 13 Sep 2011).
The Physical Object
- Description:1 online resource (232 p.)
Edition Identifiers
- ISBN:9780511529511, 0511529511
- oclc:ocn938982929
- Dewey Decimal:621.3815/2
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