Plasma processes for semiconductor fabrication

Title Statements

• Full title :Plasma processes for semiconductor fabrication / W.N.G. Hitchon.

Edition Statements

• Publication Date:1999.

Publication Statements

• Publisher(s):Cambridge University Press
• Place of Publication:Cambridge
• Language:eng
• Publication Date:1999.

The Physical Object

• Description:IX-221 p. : : illustrations ; : 26 cm

Edition Identifiers

• ISBN:0521591759, 9780521591751
• oclc:ocn468607502
• LC Classification:TK7871.85
• Dewey Decimal:537.622

Subjects

Writers

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